| Accuracy (in) | 2% of reading + LSD µm |
| Cutoff Lengths | 0.01, 0.03, 0.3" / 0.25, 0.8, 2.5, 8mm |
| Filter | 2CR or gaussian (selectable) |
| Measuring Range | 400/100/10µm |
| Pick-up Stylus | Inductive |
| Roughness Parameter | Ra, Rz, Rt, Rp, Rmr, Rpc, Rsm, Rz1max, Rsk, Rda |
| Tracer Tip | Diamond stylus Tip radius 200µ" / 5µm unless otherwise specified |
| Tracing Length | 0.01-0.89/ 0.25-25.0mm |
| Tracing Speed | 0.04"/sec, 1mm/sec |